Brand Overview
A revolutionary hybrid material
Heraeus Black Quartz (HBQ®) is a unique black opaque quartz glass composite that benefits from high purity and other properties of our advanced white opaque (OM®) and clear fused (HSQ®) quartz solutions. HBQ® offers smart answers to individual problems, and new answers to old material challenges. Convince yourself and step into a new world of possibilities with Heraeus Black Quartz.
Available Product Solutions
The manufacturing method of HBQ® allows it to be manufactured close to the dimensions of the finished component. This reduces excess material and lowers machining steps. This improved efficiency in manufacturing contributes to a lower cost for the finished part.
For available dimensions and possible maximal dimensions please contact us.
Benefits of HBQ®
High Optical Absorption
Over 95% absorption is achieved in a wide range of wavelengths from UV through VIS to MWIR in as little as 3mm of thickness. Over 80% absorption is achieved already at a thickness of just 1mm.
High Emissivity
Values for emissivity close to a black body emitter are achieved at elevated temperatures. Over a wide range of wavelength the emissivity is between 80% and 90%. Between 2.6µm and 2.7µm reaching 95%. HBQ® represents a new option as black body emitter.
Thermal Conductivity
Despite the high emissivity, HBQ® offers a very low thermal conductivity, defined by the SiO2 nature of the material. The thermal conductivity is as low as 1.5 W/mK. This offers unique application benefits, e.g. in semiconductor process chambers, adding a degree of freedom in thermal management, where heat dissipation is an issue.
Chemical Purity
The total level of impurities in HBQ® is <50 ppm, resulting in a bulk purity of >99.995%. Even for the most sensitive leading-edge semiconductor applications HBQ® is a qualified and viable material solution. HBQ® is free of carbon and problem metals like Iron, Titanium, Tungsten, Chrome or Nickel.
Mechanical Machining
Compared to the alternative black ceramic materials like SiC or AlN, HBQ® is faster and more economical when comparing machining time and tool wear. This gives HBQ® the opportunity to significantly reduce your total cost of ownership.
Chemical Inertness
Analogous to clear fused quartz material HBQ® is inert to most chemical acids and solvents. For example no reaction is seen with HCl, HNO3 or gases like Cl2, H2 or O2. In almost any atmosphere HBQ® can be used at temperatures up to 1300°C safely and reliably.
Fields of Applications
Possible Applications
- Semiconductor applications for single and multi-wafer process chambers
- Thermal homogenization of process environment
- Blocking of radiation from certain process environments
- Heating element covers, shielding plates, pedestal plates, dummy wafers, wafer holders, etc.
Technical Data
HBQ® | |
General properties | Density: 2.19 g/cm3 |
Electrical properties | Resistivity (20°C): >1015 Ω∙m |
Mechanical properties | Tensile strength: 50 MPa |
Thermal properties | Thermal expansion (20-200°C): 0,57 x 10-6 K-1 |
