Heraeus Conamic manufactures fused quartz and silica products for semiconductor applications in a variety of material grades and dimensions. The provided products are characterized by high purity and material homogeneity while maintaining low bubble contents and tight dimensional tolerances.
Product Portfolio for Semiconductor Applications
The product portfolio of Heraeus Conamic for semiconductor applications can be separated into two main areas of expertise depending on the grade of fabrication involved:
Quartz Base Materials
The Quartz Base Materials represent the basic product geometries made from fused quartz and silica like ingots, rods, tubes, plates and more. In this field Heraeus Conamic provides products in a standardized form that can already be matched to the final application in certain geometrical dimension like outer diameter, wall thickness or length.
Fabricated Quartzware
In the area of Fabricated Quartzware, Heraeus Conamic is providing fused quartz and silica products further machined to the final application as per drawing. This enables the customer to receive Fabricated Quartzware in the final geometries from the hands of one expert provider. Fabricated Quartzware can be distinguished by the production type of the final semiconductor applications:
Quartzware for Single Wafer Applications
Heraeus Conamic can provide quartzware for all typical single wafer applications such as rings, windows, domes, liners and more for all relevant semiconductor processes. Solutions are available for processing wafers from 6 inch up to 12 inch (others on request).
To ensure optimum performance of the final quartzware it is detrimental to choose the appropriate base material, surface morphology and cleanness. Heraeus Conamic can offer design support via our worldwide fabrication network connecting you with the experts in this field.
Quartzware for Batch Furnace
Regarding batch furnace applications, Heraeus Conamic can offer quartzware for all typical batch applications such as CVD, epitaxial deposition and other high-temperature processes. Product examples for batch systems are process tubes, liners, pedestals, gas injectors and many more complex components. Solutions are available for processing wafers from 4 inch up to 12 inch.
Heraeus Conamic can also provide quartzware ready for install (CFI) enabling our customers to use our products directly after delivery and without any further treatment.
To ensure optimum performance of the final quartzware Heraeus Conamic can offer design support via our worldwide fabrication network connecting you with the experts in this field.
Material Grades for Semiconductor Applications
The provided material grades of fused quartz and silica can be classified by the underlying production technology used for manufacturing the final products. In the following you can find an overview of the different material grades that Heraeus Conamic can offer, highlighted by the key feature in this application segment:
Electrically Fused Quartz (HSQ®)
The electrically fused quartz products are the benchmark for high thermal stability while maintaining superior purity and material homogeneity. Whereas the synthetic fused silica products can offer outstanding synthetic grade chemical purity. Both product ranges are available in full portfolio by geometry and size united under the Heraeus Conamic brand HSQ®.
Flame Fused Quartz (TSC®)
Heraeus Conamic uses continuous fusion technology to produce TSC® flame fused quartz and silica* products. This unique process allows customers to utilize material that features very low levels of bubbles and inclusions while maintaining high purity. *for TSC-T® synthetic soot process used
Synthetic Fused Silica (Neonyx®)
Heraeus Conamic produces synthetic fused silica products to address the most demanding needs of the semiconductor industry. The corresponding material qualities are characterized by parts per billion class purity and zero bubble content.
White Opaque Quartz (OM®)
Heraeus Opaque Material OM®100 is a white opaque high purity quartz glass. The underlying manufacturing technology results in an unique microporosity that provides high heat reflection when compared to other opaque materials.
Black Opaque Quartz (HBQ®)
Heraeus Black Quartz HBQ®100 is a black opaque high purity quartz glass composite. Additionally, to our white opaque material (OM®100) and clear fused quartz and silica solutions (HSQ®), HBQ®100 offers unique benefits for individual challenges like heat absorption in the final application.
More Material Grades
Material Grade | Production Type | Application | Feature |
HSQ® 100 | Electric | Industrial | High thermal stability, cost-efficient solution due to single step electrical fusion process, high chemical purity |
HSQ® 300 | Electric | Semiconductor, solar and industrial | High thermal stability, very high chemical purity, low bubble and inclusion content |
HSQ® 330 (S) | Electric | High- and super-high purity semiconductor | High thermal stability, very high chemical purity especially with tighter limits for alkaline and metal contaminations, low bubble and inclusion content |
HSQ® 400 | Electric | Industrial, solar, semiconductor | Very high thermal stability due to chemical stabilization layer, high chemical purity, low bubble and inclusion content |
HSQ® 700 | Electric | Semiconductor, industrial | High thermal stability, very high chemical purity especially low concentration of alkaline metals, low bubble and inclusion content |
TSC®-3N | Flame | Semiconductor, especially suitable for etch systems | Very low bubble and inclusion content, cost-efficient solution due to high volume flame fusion process, high chemical purity |
TSC®-3 | Flame | Semiconductor, especially for etch systems | Very low bubble and inclusion content, very high chemical purity, also available in large geometries |
TSC®-4 | Flame | Semiconductor, especially for etch systems | Very low bubble and inclusion content, very high chemical purity especially low aluminum and low alkaline content, also available in large geometries |
OM® 100 | Sintered | Semiconductor, industrial, solar | High heat reflection, very high chemical purity, superior surface finish |
HBQ® 100 | Sintered | Semiconductor, solar, industrial | High thermal and optical absorption, very high chemical purity, high thermal emissivity |
HSQ®-T | Synthetic | Leading edge semiconductor applications | Outstanding synthetic grade chemical purity, most elements below detection limit, available in different geometries |
TSC®-T | Synthetic | Leading edge semiconductor applications, especially for etch systems | Outstanding synthetic grade chemical purity, virtually zero bubble and inclusion free, selected geometries available in large volume |
Neonyx® OM | Synthetic | Leading edge semiconductor applications | Outstanding synthetic grade chemical purity, increased thermal reflection properties, also available in near net shape geometries |
HSQ® 900 | Synthetic | Leading edge semiconductor applications | Outstanding synthetic grade chemical purity, almost bubble and inclusion free, available in different geometries |
Spectrosil® 1000 | Synthetic | Leading edge semiconductor applications | Outstanding synthetic grade chemical purity, almost bubble and inclusion free, also available as large ingot material |
