Regarding batch furnace applications, Heraeus Conamic can offer quartzware for all typical batch applications such as CVD, epitaxial deposition and other high-temperature processes. Product examples for batch systems are process tubes, liners, pedestals, gas injectors and many more complex components. Solutions are available for processing wafers up to 12 inch.
Heraeus Conamic can also provide quartzware ready for install (CFI) enabling our customers to use our products directly after delivery and without any further treatment.
To ensure optimum performance of the final quartzware Heraeus Conamic can offer design support via our worldwide fabrication network connecting you with the experts in this field.