Fused quartz and silica rods are needed in the semiconductor industry for the manufacturing of batch processing equipment.
Heraeus Covantics offers fused quartz and silica rods in a variety of material grades and dimensions. The critical aspects of the fused quartz and silica rods are low bubble content, high purity and tight geometric tolerances.
Fusion Technologies and Benefits
In the following you will find an overview of the different fusion technologies that Heraeus Covantics can utilize, each highlighted by the leading material advantage in this segment.
Natural Fused Quartz
Electrically Fused Quartz Rods
HSQ®100 single-step quartz rods are drawn in an electrical fusion process resulting in a cost-efficient solution for many industrial applications.
For more demanding and high-end semiconductor applications Heraeus Covantics can provide multi-step and improved single step electrically fused quartz rods in HSQ®300, HSQ®330 and HSQ®330S material quality depending on the purity requirements of the customers’ application.
This results in a material with enhanced homogeneity and low OH-content for high thermal stability in the final application.
Synthetic Fused Silica
Synthetic Fused Silica Rods
Heraeus Covantics manufactures synthetic fused silica rods for leading edge semiconductor applications. HSQ®900 and Spectrosil are the corresponding material qualities with parts per billion class purity and zero bubble content.
Fields of Applications
Fused quartz rods are available to meet the tight dimensional and visual requirements in the fabrication of batch furnace components to make boats, wafer carriers and pedestals.
Heraeus Covantics portfolio covers multiple grades to address all OEM requirements including challenging ultra-high purity specifications.
Downloads
Data Sheet: Quartz Rods
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