Fused Quartz and Silica Ingots for Semiconductor Applications

Fused quartz and silica ingots are needed in the semiconductor industry for the manufacturing of batch and single wafer processing equipment.

Heraeus Conamic manufactures fused quartz and silica ingots in a variety of material grades and dimensions. The provided ingots are characterized by high purity and material homogeneity while maintaining low bubble contents.

Photo of a large cylindrical boule ingot of fused silica
  • Fusion Technologies and Benefits

    In the following you will find an overview of the different fusion technologies that Heraeus Conamic can utilize, each highlighted by the leading material advantage in this segment.

    Natural Fused Quartz

    • Electrically Fused Quartz Ingots
      HSQ® electrically fused quartz ingots are manufactured using multiple hot forming steps. This processing results in a material with enhanced homogeneity and low OH-content for high thermal stability in the final application.
    • Flame Fused Quartz Ingots
      Heraeus Conamic uses continuous fusion technology to produce TSC® flame fused quartz ingots. This unique process allows customers to utilize material that features very low levels of bubbles and inclusions while delivering the tight dimensional, visual and purity requirements in the final application.

    Synthetic Fused Silica

    Synthetic Fused Silica Ingots

    For addressing the most demanding needs of the semiconductor industry, Heraeus Conamic produces synthetic fused silica ingots in HSQ®900 and Spectrosil material qualities. All Heraeus synthetic materials are characterized by parts per billion class purity and zero bubble content.

    Opaque Quartz

    • White Opaque Quartz Ingots
      Heraeus Opaque Material OM®100 is a white opaque high purity quartz glass. The underlying manufacturing technology results in an unique microporosity that provides high heat reflection when compared to other opaque materials.
    • Black Opaque Quartz Ingots
      Heraeus Black Quartz HBQ®100 is a black opaque high purity quartz glass composite. Additionally, to our white opaque material (OM®100) and clear fused quartz and silica solutions (HSQ®), HBQ®100 offers unique benefits for individual challenges like heat absorption in the final application.
  • Fields of Applications

    Fused quartz and silica ingots are available to meet the tight purity and visual requirements in the fabrication of both batch and single wafer processing equipment.

    Heraeus Conamic portfolio covers multiple grades to address all OEM requirements including challenging ultra-high purity specifications.